Development Of High Precision Micro-motion Stage Based On Frequency Adjustable

Microelectronics manufacturing is the foundation of the national economic development and is the expression of comprehensive manufacturing capacity and technology level of the country.In recent years,with the research of microelectronic technology,micromachining and micro-fabrication technology,nanotechnology and other micro field are deepened more and more,the precise positioning technology is facing challenges on high speed,high acceleration,high-precision,large-stroke and many other aspects.Besides that,as an important carrier of the precise positioning technology,in ways of working performance,the micro-motion stage directly decides the performance of positioning system.Dynamic characteristics of traditional micro-motion stage is fixed,the output of the system only needs to consider compensating driving signal,which is difficult to meet high requirements of the stage for dynamic response.This text is creative in mechanism principle and movement control method,which has designed a kind of micro-motion stage with continuous adjustable dynamic characteristics in a certain range,which reduced the costs of design and manufacturing,and maching accuracy requirement,improved the dynamic adaptability of the stage,made the asymmetric S-curve motion profile based on the characteristics of the stage,reduced the residual vibration of the stage,improved the positioning performance of the system.Firstly,this text leads the importance of improving dynamic adaptability of the stage,clearing the emphasis for research and project of the text on the basis of discussing the research background and significance of the precision positioning for stage,cur rent research situations of domestic and overseas and the analysis of key technologies and difficulties for precision positioning stage.By analyzing the forced vibration under the harmonic drive of single-degree-of-freedom linear system,which put forward two methods of matching the vibration system and response amplitude under the operation of frequency conversion,adjust the force amplitude of excitation or change the natural frequency of the system,MATLAB simulation results shows the feasibility of adjustment methods in theory.In addition,based on tension stiffening effect,a kind of flexure hinges by way of shrapnel as guide mechanism of frequency-adjustable micro-motion stage has been designed.Having considered the fact that stress concentration produced by the root of of flexure hinges will lead to fatigue life,the external chamfering is included in the flexure hinges in a shrapnel way is brought in,and is arranged symmetrically on the two sides of micro-motion stage.Using the COMSOL Multiphysics and MATLAB joint simulation on tensile force regulating mechanism for parameter optimization to minimize stress distribution of the flexible hinges,and to analyze its static and dynamic characteristic of the micro-motion stage.Then to control position of the stage,on the one hand,to set up the control system of the stage,the corresponding mathematical modeling for the voice coil motor and tension force adjustment mechanism is carried out,and to design reasonable feedback controller;On the other hand,making a asymmetric S-curve profile based on characteristics and parameters of the stage,all these to help improve the positioning performance of the stage.Finally,building the performance testing experimental system of the micro-motion stage,making the step response test,natural frequency test,displacement characteristic test,analyzing the dynamic response performance of the stage,adjustable range of inherent frequency and static displacement characteristic,and natural frequency matching test results has verified the feasibility of adjusting natural frequency matching system response.