Design And Development Of Dynamic Simulation Software For Lithography Machine Electromechanical System

Electromechanical system modeling and dynamic simulation analysis are key steps in during the design of the lithography machine to ensure the stability and high accuracy of the complete machine system.Relevant modeling and simulation software has insufficient support for the design and development process of the complex lithography machine electromechanical system,and has not integrated design knowledge in many fields.It's in desperate need of a highly-accurate dynamic simulation software for lithography machine's electromechanical systems because existing modeling and simulation software has insufficient support for the design and development process of the complex lithography machine's electromechanical system as a result of having not integrated lithography machine's design knowledge in many fields.Based on the dynamic design concept,this thesis designs and develops a dynamic simulation software aiming at designing electromechanical system of the precision motion platform in lithography machine.The software,which integrates the key components of the lithography machine and the dynamic modeling and analysis methods of the system model,can be integrated into the design procedures of R&D units to assist designers in quickly simulating,analyzing,and optimizing electromechanical system design solutions for lithography machines,improving the development efficiency of lithography machines,and shortening design cycles.Firstly,based on the study of design and development process of the lithography machine's electromechanical system,a set of dynamics-driven lithography's electromechanical system's design flow was summarized and a software development technology route with strong scalability,stability and high efficiency is proposed.Secondly,the architecture and workflow of the software are designed and find out the key points for software development to implement parametric modeling and dynamic analysis capabilities.Then,for the key units and independent subsystems of the lithography machine's electromechanical system,analyze the dynamics of the lithography machine's electromechanical system when it's working,abstract a parametric modeling template,build a professional template library.With the support of the template library,the key parametric modeling and functions of the dynamic optimization analysis of the software are designed based on the script implementation.Finally,a custom template library and a knowledge library of the management software module were designed and developed to enhance the collection and reuse of models in the software level,effectively improving the design efficiency.Based on the above work,this thesis integrated the relevant modeling and analysis software modules according to the designed software architecture,and completed the dynamic simulation software for the lithography machine's electromechanical system.Then taking the work stage of the photolithography machine as an example object,the main functions of the software were demonstrated,and the work of software verification provided the important value in theories and engineering application.