Research On Single-len Two-dimensional Micro-angle Sensor Technology Based On Qpd

Angle measurement unit is one of the most important components in the metrology, especially the micro-angle measurement plays a great significant role in the fields of precision manufacturing, aeronautics and astronautics, communication and so on. Nowadays, with the development of precision processing and ultra-high speed processing, new requirements are presented about on-line testing precision and speed. So the research of high precise and speed measurement method of miro-angle has become an important content in these fields. What's more, it is imperative to reinforce the research of high precision, high resolution angle sensor of low cost, high stability and reliability, and its broad application in various fields including industrial control. Therefore, designing a highly sensible and small enough angle sensor to meet the need of industrial development is an urgent and meaningful issue.In order to solve the above-mentioned problems, based on optical laser autocollimation principle, we selected proper photo-electronic controller (Quadrant photoelectric diode) and optical componentsby comparing performance parameters of different components, manufactured necessary mechanical structure for holding, designed signal processing circuits based on Lab VIEW and constructed a novel small sized two-dimensional micro-angle sensor, which can realize the function of two-dimnsional micro-angle real-time measurement. The research contents of this dissertaion are:Chapter one:the research situation and development trend were reviewed and new requirements of ultro-precise measurement technology was presented by the science and technology development. Then the research purpose and significance and main content is introduced.Chapter two:the basical principle of angle sensor was reviewed. Optical components of sensors were selectively discussed and the possibility of reducing measurement dimension was analysed. Chapter three:signal processing circuits of the micro-angle sensor were designed and constructed. Simultaneously, the testing scheme based on Lab VIEW and data acquisition card were realized.Chapter four:the sensor experimental correction method was proposed. Then main performance indexes were evaluated and experimental results were analysed according to the experimental data.Chapter five:conclusions of the research content were made and the next research works were prospected.